Merced-Grafals, Emmanuelle J

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Development of VO2-based tunable micro-resonators
(2011) Merced-Grafals, Emmanuelle J; Sepulveda-Alancastro, Nelson; College of Engineering; Fernández, Félix E.; Toledo-Quiñones, Manuel; Department of Electrical and Computer Engineering; Colón-Reyes, Omar
This work presents the development of a tunable micro-mechanical resonator capable of reaching resonant frequency shifts of 23%. The resonator consists of a simple SiO2 bridge, which was fabricated using standard micro-fabrication technologies and then coated with a thin film of vanadium dioxide (VO2). The VO2 film was deposited by pulsed-laser-deposition (PLD). VO2 undergoes an insulator-to-metal transition (IMT) at close-to-room temperatures (~65oC). The observed frequency shift is due to the large stress levels that are induced on the bimorph structure due to the contraction of the VO2 film during the IMT. The simultaneous characterization of the VO2 film resistance and the resonant frequency of the bimorph micro- bridge structures coated with VO2 is accomplished using heating by conduction and by light irradiation. Both methods are compared. A temperature-to-laser-intensity relationship is also found and discussed along with a finite element method (FEM) analysis of the temperature distribution in the micro-bridge.