De Jesús Villanueva, Nérida H.

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    Single sub-micron structures testing platform for chemiresistive gas sensors: Microfabrication process design and assembly by lift method
    (2020-03-04) De Jesús Villanueva, Nérida H.; Díaz-Rivera, Rubén E.; College of Engineering; Resto-Irizarry, Pedro J.; Quintero, Pedro O.; Department of Mechanical Engineering; Rúa-de la Asunción, Armando
    Devices built at the micro and nanoscales, with high-throughput capability utilizing microfabrication methods, are traditionally achieved by photolithography. In the past decade Metal oxide Semiconductors (MOS) research has gained a lot of interest as material science has progressed toward the exploration of applications of these synthesized structures at the micro and nanoscales. MOS are usually manufactured by physical/chemical reactions and incorporated onto sensor platforms with electrodes adopting an interdigitated arrangement (IDE). Progress and viability of these MOS structures has been limited by the lack of a standardized characterizing system with easy assembly and reliability. A successful sensor design must take into consideration the constraints of nanowire (NW) materials, dimensions and physical/chemical properties, the interface platform materials and manufacturing process. Moreover, directing assembly of these nano structures onto desired configurations presents a unique challenge on itself. The assembly of NW requires techniques that are able to appropriately manipulate and direct the deposition of individual nanostructures which ideally can be achieved by a cost-effective, efficient and reliable process. We propose using the Laser Induced Forward Transfer (LIFT) method for a single layer of ethylene glycol that contains a small concentration of NWs suspended. When the pulse is activated, a single NW is transferred onto the IDE platform staged beneath the thin slice. Same process is utilized for joining of structure onto platform. Preliminary experimentation has shown the LIFT process to be successful and rather simple. This work presents the development of this innovative technique’s potential to meet the need for a simple mechanism for single structure assembly of nano/microstructures onto electrode platforms for characterization and deployment.