Pitre-Andrade, Carlos S.

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    Crecimiento y caracterización de películas delgadas de vo, V6O13 y VO2 por sputtering magnetron dc
    (2006) Pitre-Andrade, Carlos S.; Fernández, Félix E.; College of Arts and Science - Science; Marrero, Pablo J.; Jiménez, Héctor J.; Department of Physics; Mina, Nairmen
    Thin films of several vanadium oxides in pure phases: VO, V6O13 and VO2, were grown on glass substrates. The deposition technique used was reactive dc magnetron sputtering. Fabrication of the films with different phases was achieved by varying growth conditions, particularly substrate temperature and the oxygen/argon ratio in the vacuum chamber. X-ray diffraction studies showed that the V6O13 films are highly oriented en the (00l) direction, which had not been previously reported for films grown by sputtering. Good structural orientation was also found for the VO and VO2 films. The films were characterized for their optical properties, by transmission measurements in the visible and ultraviolet range, as well as for their electrical properties, by measurements of the change in resistance as a function of temperature. Some of the properties, both optical and electrical, exhibited by polycrystalline V6O13 powders were verified. Optical transmittance results for VO thin films, which had not been published before, are reported. For the V6O13 films no evidence was found for a semiconductor - to – metal transition in the temperature range 120-200K, in which the material behaved as a semiconductor. This contradicts previously published results for V6O13 powders, but agrees with results previously published for films of this material grown by the CVD technique.