Now showing items 1-2 of 2
Development of filtration/biotreatment schemes to recycle CMP wastewater
Environmentally benign processing is a concept geared towards reducing the release of pollutants into the environment while maximizing the industrial recyclables. It has been demonstrated that effluents, especially at the ...
Novel separation methods for removing nanoparticles and copper from chemical mechanical planarization wastes
Chemical mechanical planarization (CMP) wastewater emanating from semiconductor processing contains copper (II) ions and either alumina and/or silica nanoparticles. The efficiency of biotreatment schemes to remove copper ...