Ramos-Rivera, Glorimar

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    Fabrication, characterization and testing of functionally graded aluminum-based targets for sputtering deposition of hybrid composites
    (2011) Ramos-Rivera, Glorimar; Suárez, O. Marcelo; College of Engineering; Quintero, Pedro; Valentín, Ricky; Department of Mechanical Engineering; Palomera García, Rogelio
    The fabrication, characterization and testing of sputtering targets were completed for the deposition of hybrid composites. The chemical composition of the target specimens consisted of an aluminum-silicon matrix reinforced with AlB12 and AlB2 particles. These composites were manufactured by centrifugal casting and vacuum casting (as control samples). The characterization of the composites was divided into three sections: structure, mechanical properties and thermal properties. The characterization results showed better segregation of reinforcement in the composites containing AlB2 particles. Associated with this particle segregation accompanying changes in the mechanical and thermal properties of the compound were found.. The thermal analysis of the composites showed that both silicon and the presence of borides in the composite were responsible for the decrease in melting point and thermal expansion coefficient of the compound respectively. The fabricated targets were mounted in the AJA sputtering system with varying power from 200 to 450 W to determine which of the power set produced films with the smallest surface roughness; in this case was 450W. Afterwards, at this power films were deposited over glass, silicon and polymer substrates. Preliminary studies of structure and mechanical properties of the films showed that the films produced with the centrifuged targets had smaller grain size, dominant compression stresses, higher hardness and elastic modulus, and higher disorder in the crystalline structure when compared to the films produced with pure aluminum target.